ZONDA真空六自由度定位平臺是一種全新的高性能六自由度系統,可滿足對高精度、穩定性、精度、重載和大行程的應用要求。
ZONDA真空六自由度定位平臺設計用于定位高達 400 kg 的有效載荷,分辨率僅為 0.1 µm,XY 方向為 400 mm,Z 方向為 300 mm,Rx、Ry 和 Rz 三個旋轉方向為 40°,具有出色的行程。
ZONDA真空六自由度定位平臺具有無與倫比的精度和熱穩定性特性,這要歸功于具有極低 CTE(熱膨脹系數)的集成因瓦組件、作為標準集成在執行器中的線性絕對編碼器以及特別剛性接頭的設計。
ZONDA真空六自由度定位平臺可用于任何方向:垂直、水平、倒置……
ZONDA真空六自由度定位平臺產品特點:采用步進電機,最大負載500KG,分辨率0.1urad,重復定位精度0.5um,超高穩定性,大行程,真空兼容。
ZONDA hexapod is a new high-performance 6DOF system meeting applications requiring both high precision, stability, accuracy, heavy load and large travels.
Designed to position up to 400 kg payload with a resolution of 0.1 µm only, ZONDA hexapod offers great travel with 400 mm in XY, 300 mm in Z, and 40 ° in the three rotations Rx, Ry and Rz.
ZONDA hexapod has unmatched accuracy and thermal stability characteristics thanks to the integrating Invar components with a very low CTE (Coefficient of Thermal Expansion), linear absolute encoders integrated as a standard in the actuators and the design of particularly rigid joints.
ZONDA hexapod can be used in any orientation: vertical, horizontal, upside down…